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Full-field EUV and immersion lithography integration in 0.186μm2 FinFET 6T-SRAM cell

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54 Author(s)

We report on a major advancement in full-field EUV lithography technology. A single patterning approach for contact level by EUVL (NA=0.25) was used for the fabrication of electrically functional 0.186 mum2 6T-SRAMs, with W-filled contacts. Alignment to other 193 nm immersion litho levels shows very good overlay values les20 nm. Other key features of the process are: 1) use of high-k/Metal Gate FinFETs with good gate CD control: 3sigmales7 nm after double-dipole 193 nm immersion litho (NA=0.85) and 3sigmales9 nm after double-Hard Mask gate etch; and 2) use of an ultra-thin NiPt-silicide for S/D and an optimized spacers module without Si recess at dense FINs pitch. Excellent SRAM VDD scalability down to 0.6V (SNM>0.1VDD) and healthy electrical characteristics (VT, sigma(DeltaVT), I-V) for the cell transistors are obtained.

Published in:

Electron Devices Meeting, 2008. IEDM 2008. IEEE International

Date of Conference:

15-17 Dec. 2008