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In the context of a design space exploration framework for supporting the platform-based design approach, we address the problem of robustness with respect to manufacturing process variations. First, we introduce response surface modeling techniques to enable an efficient evaluation of the statistical measures of execution time and energy consumption for each system configuration. We then introduce a robust design space exploration framework to afford the problem of the impact of manufacturing process variations onto the system-level metrics and consequently onto the application-level constraints. We finally provide a comparison of our design space exploration technique with conventional approaches.