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A Planar CMOS Field-Emission Vacuum Magnetic Sensor

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3 Author(s)
French, P.J. ; Dept. of Electron. & Electr. Eng., Univ. Coll. London, London ; Kenyon, Anthony J. ; Garner, D.M.

We have fabricated a CMOS vacuum magnetic sensor that exploits the deflection of an electron beam produced by field emission by a perpendicular magnetic field. The device is planar and fabricated by conventional lithography and etching processes. An extremely high magnetic field sensitivity of 4times103%/T is reported.

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Electron Devices, IEEE Transactions on  (Volume:56 ,  Issue: 4 )