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Browse Journals & Magazines > Magnetics, IEEE Transactions ...> Volume:45 Issue:3 Help

Prototype Design of a Thin-Film Bulk Acoustic-Wave Resonator by the Finite Element Method

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4 Author(s)
De Santis, V. ; Dept. of Electr. & Comput. Eng., Univ. of L''Aquila, L''Aquila ; Feliziani, M. ; Buccella, C. ; Tognolatti, P.

A thin film bulk acoustic wave resonator (FBAR) used in the RF frequency region of a few gigahertz is considered and its impedance is evaluated by using a harmonic analysis with the three-dimensional finite element method. In particular, the spurious characteristics caused by variations in the electrode area, as well as all the resonant modes and the mode shapes are analyzed. A design procedure is presented by using a prediction software tool. An experimental prototype is built and the measured results are compared to the numerical ones.

Published in:
Magnetics, IEEE Transactions on  (Volume:45 ,  Issue: 3 )

Date of Publication: March 2009

Page(s):
1116 - 1119
ISSN :
0018-9464
INSPEC Accession Number:
10499144
Digital Object Identifier :
10.1109/TMAG.2009.2012646
Product Type:
Journals & Magazines
Date of Current Version :
24 February 2009
Issue Date :
March 2009
Sponsored by :
IEEE Magnetics Society

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