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Fast Laser Scanning Imaging System for Surface Displacement Measurements

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5 Author(s)
Grauby, S. ; Centre de Phys. Moleculaire Opt. et Hertzienne, Univ. Bordeaux 1, Talence ; Salhi, A. ; Rampnoux, Jean-Michel ; Claeys, W.
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We present a scanning imaging system using galvanometric mirrors coupled to a heterodyne interferometric probe. This setup is dedicated to the off-plane surface displacement imaging, in particular for microelectronic devices. The use of galvanometric mirrors coupled to the heterodyne probe makes it a sensitive and fast measurement system. We present results on a microelectronic device, and we compare the performances of this system with point and CCD interferometry imaging setups.

Published in:

Electron Device Letters, IEEE  (Volume:30 ,  Issue: 3 )