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The Extraction of Dielectric Constant by Using the Metal Insulator Metal Capacitor for the Substrate Material

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5 Author(s)
Tsun-Lung Hsieh ; Electr. Lab., Adv. Semicond. Eng., Inc., Kaohsiung ; Gwo-Jia Jong ; Chih-Wei Wu ; Tsung-Lun Lee
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In this paper, the substrate is extracted the material characterization for several capacitor patterns. We design some pads and vias by measuring. The substrate material can be extracted unknown dielectric properties. Then, the new packaging have been designed and completed, it is verified the electrical performance by using EM simulator and save cycle time.

Published in:

Microsystems, Packaging, Assembly & Circuits Technology Conference, 2008. IMPACT 2008. 3rd International

Date of Conference:

22-24 Oct. 2008

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