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Nanotribological characteristics, including coefficient of friction, wear coefficient, and wear resistance, of Cu6Sn5, Cu3Sn, and Ni3Sn4 intermetallic compounds developed by annealing Sn-Cu or Sn-Ni diffusion couples were investigated in this work. The scratch test conditions combine a constant normal load of 10, 20, or 30 mN and a scratch rate of 0.1 1, or 10 mum/s. Experimental results indicate that as the normal load increases, the pile-up heightens and the scratch deepens, leading to greater coefficient of friction and wear coefficient while smaller wear resistance. Moreover, the scratch rate does not have a significant effect on the nanotribological characteristics except for Cu6Sn5 and Cu3Sn under a normal load of 10 mN. Though hardness of Cu6Sn5, Cu3Sn, and Ni3Sn4 is similar, Ni3Sn4 appears to be more prone to wear damage.