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Fabrication and Testing of a TMMF S2030 Based Micro Fluidic Device for Single Cell Analysis

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6 Author(s)
Mokkapati, V.R.S.S. ; Dept. of Microelectron., Delft Univ. of Technol./DIMES, Delft ; Zhang, L. ; Hanfoug, R. ; Mollinger, J.
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Current paper describes the fabrication and testing of a Lab-on-a-chip device using TMMF S2030 dry film resist for single cell analysis. The device typically consists of a bigger channel (20 mum deep), 3 smaller channels (2 mum deep) with embedded reservoir in between and a detector towards the downstream.Whole device has been fabricated on a standard glass wafer. Electrode configuration is the notable factor in which pre-sorter electrodes were introduced to bring far-off particles to the trapping range. Dielectrophores is technique will be used to trap a single particle/cell with in the reservoir. Bigger channels were fabricated in TMMF and that of the smaller channels in silicon dioxide. Testing of the channels as successfully done using carboxylate modified fluorescent polystyrene beads (wavelength 605 nm).Currently we are working towards trapping a tumorcell and study the viability and detection mechanisms.

Published in:

Quantum, Nano and Micro Technologies, 2009. ICQNM '09. Third International Conference on

Date of Conference:

1-7 Feb. 2009