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High-Speed Resonant Microdisk Photodetectors Heterogeneouly Integrated to Si-Wire Waveguide

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3 Author(s)
Ter-Hoe Loh ; Data Storage Inst., A-STAR, Singapore, Singapore ; Bhola, B. ; Seng-Tiong Ho

Etched-mesa micro-disk resonant photo-detector heterogeneously integrated to Si-wire waveguide by oxide-to-oxide bonding has been proposed and analyzed by 3D-FDTD simulation. The 3 mum-, 5 mum- and 8 mum-diameter devices give free-spectral-ranges of 9.4THz, 5.8THz and 3.3THz, respectively. 3 mum- and 5 mum-diameter photo-detector potentially can give bandwidths better than 100 GHz.

Published in:

PhotonicsGlobal@Singapore, 2008. IPGC 2008. IEEE

Date of Conference:

8-11 Dec. 2008