Cart (Loading....) | Create Account
Close category search window
 

Electrical/Mechanical Modeling, Reliability Assessment, and Fabrication of FlexConnects: A MEMS-Based Compliant Chip-to-Substrate Interconnect

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Kacker, K. ; Comput.-Aided Simulation of Packaging Reliability Lab., Georgia Inst. of Technol., Atlanta, GA ; Sitaraman, S.K.

Compliant free-standing structures can be used as chip-to-substrate interconnects. Such ldquocompliant interconnectsrdquo are a potential solution to the requirements that will be imposed on chip-to-substrate interconnects over the next decade. However, cost of implementation and electrical performance limit compliant interconnects. In our previous work, we have proposed a new compliant interconnect technology called FlexConnect to address these concerns with compliant interconnects. An innovative cost-effective MEMS-based fabrication process is used to fabricate these compliant interconnects. Sequential lithography and electroplating processes with up to two masking steps are utilized. Utilizing the proposed fabrication process, in this paper, FlexConnects are realized at a 100-mum pitch. High-frequency modeling of the electrical parasitics of the interconnect is performed. Through finite-element-based models, the advantage of using multiple electrical paths as part of the interconnect design is shown from a thermomechanical reliability perspective. Finally, taking advantage of the MEMS-based photolithographic fabrication process, a heterogeneous combination of FlexConnects and column interconnects is proposed. This approach is shown to be an additional avenue to attain improved electrical performance without compromising mechanical performance.

Published in:

Microelectromechanical Systems, Journal of  (Volume:18 ,  Issue: 2 )

Date of Publication:

April 2009

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.