Magnetic levitated high precision positioning system based on antagonistic mechanism

A six degree-of-freedom magnetically levitated high precision micro positioning system is designed to get rid of the friction which is one of the important factors limiting the resolution and accuracy of positioning devices. Since magnetic levitation systems are inherently unstable, most of the emphasis is placed on a magnetic circuit design so as to increase the system dynamic stability. For this, the proposed levitation system is constructed by using an antagonistic structure which permits a simple design and robust stability. From the dynamic equations of motion, it is verified that the proposed magnetic levitation system is internally stable in 5 degree-of-freedom. Experimental results of motion of free vibration are presented to verify the proposed modeling method.