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High quality factor silicon nitride microdisk resonators for chip-scale visible sensing

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3 Author(s)
Hosseini, E.S. ; Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA ; Yegnanarayanan, S. ; Adibi, A.

Ultra-high-quality (Q>4times106) microdisk resonators are demonstrated in a Si3N4 platform at 655 nm with straight and curved in-plane coupling waveguides. Selective coupling to specific radial orders and polarizations is demonstrated by phase-matching. TM modes show higher sensitivity to environmental modifications for sensing.

Published in:

IEEE/LEOS Winter Topicals Meeting Series, 2009

Date of Conference:

12-14 Jan. 2009