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Development of gas sensor system based on the TiO2/Pani composite thin film

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5 Author(s)
Izzuddin, I. ; Sch. of Appl. Phys., Univ. Kebangsaan Malaysia, Bangi ; Ramli, N. ; Salleh, M.M. ; Yahaya, M.
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Development of organic and inorganic composites has grown in recent years due to a wide range of potential use of these materials. The aim of this research is to investigate the effect of Pani additions on the TiO2 based thin film as VOC gas sensing properties. TiO2 were prepared using sol gel technique. Up to 3 wt% of Pani were directly added to the TiO2 solution. 3 layers of TiO2/Pani solution mixture were deposited onto SiO2 coated silicon substrate using spin coating technique for fabrications of gas sensing device. The microstructures properties of samples were investigated using XRD, TEM and SEM. In addition, all samples were exposed to ethanol for gas sensing performance test. The gas sensing test revealed that all films were responsive towards ethanol vapour exposure with 2 wt% TiO2/Pani film exhibited the best sensitivity. However, over longer exposure cycles, it was observed that 3 wt% TiO2/Pani film have a better stability.

Published in:

Semiconductor Electronics, 2008. ICSE 2008. IEEE International Conference on

Date of Conference:

25-27 Nov. 2008