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Design of low actuation voltage RF MEMS cantilever switch

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3 Author(s)
S. Kanthamani ; RF systems Lab, Department of ECE, Thiagarajar College of Engg. Madurai-15, TamilNadu, INDIA ; S. Raju ; V. Abhai Kumar

This paper presents the design and RF characterization of micro electromechanical system (MEMS) switches realized on elevated coplanar waveguide for high-speed applications. The capacitive air gap between signal line and the cantilever is 1 um. The lowest actuation voltage obtained is 6 V. The insertion loss of switch and its associated transmission line is -0.31 dB (mainly contributed by the transmission line itself) and the isolation was around -21.67 dB at 40 GHz.

Published in:

Recent Advances in Microwave Theory and Applications, 2008. MICROWAVE 2008. International Conference on

Date of Conference:

21-24 Nov. 2008