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This paper presents the design and RF characterization of micro electromechanical system (MEMS) switches realized on elevated coplanar waveguide for high-speed applications. The capacitive air gap between signal line and the cantilever is 1 um. The lowest actuation voltage obtained is 6 V. The insertion loss of switch and its associated transmission line is -0.31 dB (mainly contributed by the transmission line itself) and the isolation was around -21.67 dB at 40 GHz.
Date of Conference: 21-24 Nov. 2008