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Design of low actuation voltage RF MEMS cantilever switch

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3 Author(s)
Kanthamani, S. ; Dept. of ECE, Thiagarajar Coll. of Eng., Madurai ; Raju, S. ; Kumar, V.A.

This paper presents the design and RF characterization of micro electromechanical system (MEMS) switches realized on elevated coplanar waveguide for high-speed applications. The capacitive air gap between signal line and the cantilever is 1 um. The lowest actuation voltage obtained is 6 V. The insertion loss of switch and its associated transmission line is -0.31 dB (mainly contributed by the transmission line itself) and the isolation was around -21.67 dB at 40 GHz.

Published in:
Recent Advances in Microwave Theory and Applications, 2008. MICROWAVE 2008. International Conference on

Date of Conference: 21-24 Nov. 2008

Page(s):
584 - 586
E-ISBN :
978-1-4244-2691-1
Print ISBN:
978-1-4244-2690-4
INSPEC Accession Number:
10469027
Conference Location :
Jaipur
Digital Object Identifier :
10.1109/AMTA.2008.4763058

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