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High-Q VHF micromechanical filters using free-free beam resonators

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2 Author(s)
Li, C.-J. ; Dept. of Mech. & Autom. Eng., Nat. Kaohsiung First Univ. of Sci. & Technol., Kaohsiung ; Lin, S.-K.

This paper presents an innovative micromechanical bandpass filter using free-free beam resonators and torsional coupling beams for VHF applications. The rationale for adopting free-free beam resonators is that the free-free beam resonators would experience less anchor loss than a clamped-clamped resonators. ANSYS simulation shows that the proposed free-free beam filter possess less anchor loss. Finally, experimental results demonstrate that the free-free beam filter is feasible at the VHF operation.

Published in:

Electron Devices and Solid-State Circuits, 2008. EDSSC 2008. IEEE International Conference on

Date of Conference:

8-10 Dec. 2008