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NEMS based on top-down technologies: from stand-alone NEMS to VLSI NEMS & NEMS-CMOS integration

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18 Author(s)

This paper reviews some recent advances related to NEMS based on top-down technologies: from stand-alone NEMS to VLSI NEMS and NEMS-CMOS integration.

Published in:

Electron Devices and Solid-State Circuits, 2008. EDSSC 2008. IEEE International Conference on

Date of Conference:

8-10 Dec. 2008