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Silicon-micromachined micromirrors with integrated high-precision actuators for external-cavity semiconductor lasers

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4 Author(s)
Kiang, Meng‐Hsiung ; Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA ; Solgaard, O. ; Muller, R.S. ; Lau, Kam Y.

We present an actuated silicon-micromachined micromirror with continuous and highly accurate position adjustment designed to be used in the construction of external-cavity semiconductor-laser modules. In our initial design, a positioning accuracy better than /spl plusmn/0.2 /spl mu/m for the actuated micromirrors is obtained. The mechanical robustness, small size, and fine-positional precision of the actuated micromirrors are sufficient for external-cavity-laser applications. In production, the cost of these miniature external-cavity-laser systems should be low because they are batch-processed.

Published in:

Photonics Technology Letters, IEEE  (Volume:8 ,  Issue: 1 )

Date of Publication:

Jan. 1996

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