Silicon-micromachined micromirrors with integrated high-precision actuators for external-cavity semiconductor lasers

We present an actuated silicon-micromachined micromirror with continuous and highly accurate position adjustment designed to be used in the construction of external-cavity semiconductor-laser modules. In our initial design, a positioning accuracy better than /spl plusmn/0.2 μm for the actuated micromirrors is obtained. The mechanical robustness, small size, and fine-positional precision of the actuated micromirrors are sufficient for external-cavity-laser applications. In production, the cost of these miniature external-cavity-laser systems should be low because they are batch-processed.