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Compensation of interface circuit errors for MEMS gyroscopes using state observers

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3 Author(s)
Chien-Yu Chi ; Department of Mechanical Engineering, National Chiao Tung University, Hsinchu, Taiwan (R.O.C.) ; Yen-Pin Peng ; Tsung-Lin Chen

This paper presents a novel approach that can compensate the error resulting from interface circuits for MEMS gyroscopes. Different from most of existing researches on gyroscopes wherein the interface circuits are either assumed to be ideal or optimized individually, this approach uses state estimation techniques to compensate the errors resulting from interface circuits and mechanical structure uncertainties, and to obtain correct angular rates for gyroscope systems. In a simulation case where the imperfections of interface circuits include: offset voltages of the operational amplifiers (3 mV and drifting with time), the parasitic capacitance (2 pF), and the measurement noise (white noise, 0.5 mV ), the proposed method can estimate the angular rate correctly with an estimation accuracy of 8 times 10-4rad/sec.

Published in:

2008 3rd International Conference on Sensing Technology

Date of Conference:

Nov. 30 2008-Dec. 3 2008