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Modeling of a three-layer piezoelectric bimorph beam with hysteresis

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2 Author(s)
Low, T.S. ; Magnetics Technol. Center, Nat. Univ. of Singapore, Singapore ; Guo, W.

Piezoelectric actuators are usually stacked or bimorph in configuration. In this paper the mechanics of a three-layer piezoelectric bimorph is discussed and its dynamic model with hysteresis is presented. The results can be used to analyze piezoelectric actuators constructed with three-layer piezoelectric bimorphs. A piezoelectric bimorph actuator has been fabricated and experiments have been carried out to verify the model. The calculated results of this model closely matched the tested results. This model can also be used with other types of piezoelectric actuators with a slight modification

Published in:

Microelectromechanical Systems, Journal of  (Volume:4 ,  Issue: 4 )