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Magnetic microactuation of polysilicon flexure structures

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3 Author(s)
Judy, J.W. ; Sensor & Actuator Center, California Univ., Berkeley, CA, USA ; Muller, R.S. ; Zappe, H.H.

A microactuator technology that combines magnetic thin films with polysilicon flexural structures is described. Devices are constructed in a batch-fabrication process that combines electroplating with conventional lithography, materials, and equipment. A microactuator consisting of a 400×(47-40)×7 μm3 rectangular plate of NiFe attached to a 400×(0.9-1.4)×2.25 μm3 polysilicon cantilever beam has been displaced over 1.2 mm, rotated over 180°, and actuated with over 0.185 nNm of torque. The microactuator is capable of motion both in and out of the wafer plane and has been operated in a conductive fluid environment. Theoretical expressions for the displacement and torque are developed and compared to experimental results

Published in:

Microelectromechanical Systems, Journal of  (Volume:4 ,  Issue: 4 )

Date of Publication:

Dec 1995

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