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Design optimization for an electro-thermally actuated polymeric microgripper

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3 Author(s)
Voicu, R. ; Nat. Inst. for R & D in Microtechnologies (IMT-Bucharest), Bucharest ; Muller, R. ; Eftime, L.

Thermal micro-actuators are a promising solution to the need for large-displacement, gentle handling force, low-power MEMS actuators. Potential applications of these devices are micro-relays, assembling and miniature medical instrumentation. In this paper the development of thermal microactuators based on SU-8 polymer is described The paper presents the development of a new microgripper which can realize a movement of the gripping arms with possibility for positioning and manipulating of the gripped object. Two models of polymeric microgripper electro-thermo-mechanical actuated, using low actuation voltages, designed for SU-8 polymer fabrication were presented. The electro-thermal microgrippers were designed and optimized using finite element simulations. Electro-thermo-mechanical simulations based on finite element method were performed for each of the model in order to compare the results. Preliminary experimental tests were carried out.

Published in:

Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on

Date of Conference:

9-11 April 2008