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Phase Shifter Design Based on Fast RF MEMS Switched Capacitors

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4 Author(s)
Benjamin Lacroix ; XLIM UMR 6172 - Université de Limoges / CNRS, 123 avenue Albert Thomas 87060 Limoges cedex FRANCE. lacroix@xlim.fr ; Arnaud Pothier ; Aurelian Crunteanu ; Pierre Blondy

This paper presents the design and fabrication of fast DMTL RF MEMS phase shifters. Distributed MEMS Transmission Lines are being used with miniature RF MEMS switched capacitors (40 times 40 mum2), actuating at 25 V with a switching time around 1 mus. Both 90 and 180 degree phase shifters presented here operate at 20 GHz, are respectively less than 4.5 mm and 8.5 mm long. They are designed with 6 and 12 unit cells to achieve the desired phase shift. Measured return loss is respectively better than -13 dB and -11 dB for the 90 and the 180 degree phase shifters, and insertion loss is respectively less than 0.8 dB and 1.8 dB at 20 GHz.

Published in:

Microwave Conference, 2008. EuMC 2008. 38th European

Date of Conference:

27-31 Oct. 2008