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Analysis of the geometry on robustness of ESD protection devices

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5 Author(s)
Chvala, A. ; Dept. of Microelectron., Slovak Univ. of Technol. in Bratislava Ilkovicova, Bratislava ; Donoval, Daniel ; Beno, P. ; Marek, J.
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The analysis of the ESD protection devices supported by the advanced 2-D and 3-D mixed mode electro-thermal device and circuit simulation is presented. The influence of structure geometry on the electrical properties of ESD devices is studied. The optimization of the structure geometry allows down-shrink of the ESD protection device dimensions with further improvement of its main electrical parameters.

Published in:

Advanced Semiconductor Devices and Microsystems, 2008. ASDAM 2008. International Conference on

Date of Conference:

12-16 Oct. 2008

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