By Topic

Pull-in control during nanometric positioning by near field position sensing

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Blanvillain, S. ; Dept. of Control Syst. (Former LAG), GIPSA-Lab., Grenoble, France ; Voda, A. ; Besancon, G.

This paper deals with the pull-in control and the nanopositioning of an electrostatically actuated NEMS (nano electromechanical system) squeezed between two forces. It is shown that when a position sensor is driven close to a NEMS, pull-in occurs due to electrostatic forces, but also to near field forces acting at nanoscale, namely Casimir and Van der Waals forces. Pull-in conditions are investigated to find the minimum pull-in distance depending on the parameters of the system. This paper aims to demonstrate that the sensor can be driven below this minimum pull-in distance. To do so, a control strategy based on a nonlinear feedback design and on a robust pole placement/sensitivity function shaping is proposed. Furthermore, it is shown that the NEMS position can be controlled without contact while avoiding pull-in and decreasing its natural Brownian motion.

Published in:

Decision and Control, 2008. CDC 2008. 47th IEEE Conference on

Date of Conference:

9-11 Dec. 2008