We report high-speed ultra-violet (UV) micro machining of polymers using a high beam quality frequency-doubled copper vapor laser (CTL). The characteristics of the UV laser source and beam delivery optics are described, Measurements of material removal rates have been made for a number of polymers. Results for UV-CVL micro-drilling of PETG and polyimide (kapton) show removal rates per pulse similar to other UV sources, but the high pulse repetition frequency of the UV-CVL results in much enhanced temporal material removal rates
Published in:
Selected Topics in Quantum Electronics, IEEE Journal of
(Volume:1
,
Issue:
3
)
Date of Publication: Sep 1995