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High-speed UV micro-machining of polymers with frequency-doubled copper vapor lasers

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3 Author(s)
Glover, A.C.J. ; Centre for Lasers & Applications, Macquarie Univ., North Ryde, NSW, Australia ; Illy, E.K. ; Piper, J.A.

We report high-speed ultra-violet (UV) micro machining of polymers using a high beam quality frequency-doubled copper vapor laser (CTL). The characteristics of the UV laser source and beam delivery optics are described, Measurements of material removal rates have been made for a number of polymers. Results for UV-CVL micro-drilling of PETG and polyimide (kapton) show removal rates per pulse similar to other UV sources, but the high pulse repetition frequency of the UV-CVL results in much enhanced temporal material removal rates

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Selected Topics in Quantum Electronics, IEEE Journal of  (Volume:1 ,  Issue: 3 )

Date of Publication: Sep 1995

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