By Topic

Mach-Zehnder modulators with lithium niobate ridge waveguides fabricated by proton-exchange wet etch and nickel indiffusion

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Rei-Shin Cheng ; Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan ; Wei-Lin Chen ; Way-Seen Wang

Mach-Zehnder ridge waveguide modulators on c/sup +/-LiNbO3 by proton-exchange wet etch and nickel indiffusion are fabricated for the first time. Modulators operating at 0.633 μm and 1.31 μm are both produced, and the half-wave voltages are measured to be 4 V and 22.5 V, respectively, for an electrode length of 6 mm. The extinction ratios are 14 dB and 13.2 db, respectively, and can be improved by forming the ridge structure only at the electrode interaction region instead. These results make the wet-etched LiNbO3 optical devices promising to take over the dry-etched ones in the near future.

Published in:

Photonics Technology Letters, IEEE  (Volume:7 ,  Issue: 11 )