Scheduled System Maintenance on May 29th, 2015:
IEEE Xplore will be upgraded between 11:00 AM and 10:00 PM EDT. During this time there may be intermittent impact on performance. We apologize for any inconvenience.
By Topic

Design and fabrication of Bragg reflectors based on SU-8

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

7 Author(s)
Shu, Zhen ; Dept. of Microelectron., Fudan Univ., Shanghai, China ; Wan, Jing ; Xie, Shen-Qi ; Lu, Bing-Rui
more authors

We report the design and fabrication of two kinds of distributed Bragg reflectors (DBRs). One is a Bragg filter which introduces a periodic height modulation in part of a waveguide, and the other is a horizontal DBR with a deeply patterned grating structure in a waveguide at a freespace wavelength of 1.55 um (the propagation loss of quartz fiber used in optical communication is lowest around 1.55 um wavelength) based on a Si/SiO2/SU8/air structure. The transfer matrix theory was used to calculate the spectral response of the Bragg filter and its dependence on the height modulation and the grating length. In addition, a multilayer film reflection theory was applied to simulate reflection spectrum of the DBR and estimate the least number of pairs of DBR mirrors needed for almost 100% (¿ 99.6%) reflection. Based on the simulation results, we designed and successfully fabricated these two types of DBRs with Si/SiO2/SU8/air structures.

Published in:

Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on

Date of Conference:

20-23 Oct. 2008