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Broadly-tunable resonant-cavity light-emitting diode

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2 Author(s)
Larson, M.C. ; Solid State Electron. Lab., Stanford Univ., CA, USA ; Harris, J.S., Jr.

Microelectromechanical wavelength tuning is demonstrated for the first time in a resonant-cavity light-emitting diode. The device utilizes a deformable-membrane top mirror suspended by an air gap above a diode-active region and bottom mirror. Applied membrane-substrate bias produces an electrostatic force which reduces the air-gap thickness, and therefore, the resonant wavelength. We report broad tunability of nearly 40 nm and spectral linewidths as narrow as 1.9 nm (2.6 meV) for operation near 950 nm.<>

Published in:

Photonics Technology Letters, IEEE  (Volume:7 ,  Issue: 11 )

Date of Publication:

Nov. 1995

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