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Improvement of the crystallinity and optical properties of sol-gel ZnO thin film by a PVD ZnO buffer layer

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6 Author(s)
Shu-Yi Liu ; Dept. of Microelectron., Fudan Univ., Shanghai, China ; Tao Chen ; Yu-Long Jiang ; Guo-Ping Ru
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The effect of the ZnO homo-buffer layer on the structural, optical and electrical properties of the Sol-gel ZnO films was systematically investigated. The XRD and SEM results show that the homo-buffer layer can improve the degree of the preferential c-axis orientation (the best Lotering orientation factor (F) can reach 0.915), the grain size and the surface morphology of thereon ZnO films. A narrower UV emission at 380 nm was observed with weaker deep-level visible emission for the ZnO films with a homo-buffer layer using room-temperature (RT) photoluminescence (PL) spectra. The electrical results show that the carrier concentration of the films with buffer layer is decreased and the Hall mobility is increased, indicating that a ZnO homo-buffer layer can effectively improve the crystallinity of the films and improve both electrical and optical properties.

Published in:

Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on

Date of Conference:

20-23 Oct. 2008