It has previously been reported that preoxidation of the bottom electrode prior to deposition of the Al 2 O 3 or MgO barrier in magnetic tunnel junctions acts to suppress orange-peel coupling between Co electrodes. Here, we present specular and diffuse X-ray scattering measurements from Co/MgO multilayer repeat structures which suggest that this drop arises from a reduction in the in-plane correlation length of the roughness at the electrode-barrier interface rather than reduction in roughness amplitude.
Published in:
Magnetics, IEEE Transactions on
(Volume:44
,
Issue:
11
)
Date of Publication: Nov. 2008