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Ni–Cr-Based Thin-Film Cryoresistors

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4 Author(s)
Satrapinski, A.F. ; Centre for Metrol. & Accreditation, MIKES, Espoo ; Savin, A.M. ; Novikov, Sergei ; Hahtela, O.M.

Ni-Cr-based thin-film resistors have been fabricated and studied at temperatures of down to 50 mK. The resistivity of the films varied within (14-25)Omega*sq, depending on the additions of Cu, Al, Ge, and Mn. The minimum temperature coefficient (TC) at 4.2 K (TC = -50 middot 10 -6/K) is obtained for Ni75Cr20CU2.5AI2.5 (Evanohm alloy) doped with 2.5% Ge. At the 50-150 mK range, the TC of the alloy increases to -4.15 middot 10 -6/mK. The resistors demonstrate the Kondo minimum at 20-30 K. The power coefficient of the 560-kOmega sample, which was measured at 4.2 K, was found to be les -0.008 middot 10 -6/muW. Power dependence measurements at subkelvin temperatures showed an electron overheating at the power level of above 10 p W for a 500-k film resistor.

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Instrumentation and Measurement, IEEE Transactions on  (Volume:58 ,  Issue: 4 )