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Fluidic-coupled high-resolution displacement sensor for low-power wireless applications

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3 Author(s)
Jager, T. ; Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg ; Reindl, L. ; Wulff, K.

This paper presents an innovative high-resolution displacement sensor for low-power-applications, such as wireless systems. The sensor uses the principle of fluidic coupled displacement pressure conversion. The sensor core is based on a piezo-resistive silicon pressure sensor element. A membrane detects the displacement to be measured and changes the pressure of a partly compressible fluid. The change in pressure is then determined by measuring the sensor resistance. In addition, the on-chip temperature is measured and used to increase the sensor accuracy. The measurement range depends on the fluid compressibility and has a typical value of 50 - 100 mum with a resolution of 1 mum. A functional model has been realized and tested in respect to resolution and reliability. Using multiple smart-system integration, a sensor size of 6 mm in diameter and 25 mm in length could be realized.

Published in:

Sensors, 2008 IEEE

Date of Conference:

26-29 Oct. 2008