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Piezoelectric transducers using micromachined bulk piezo substrates

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5 Author(s)
Xiaoning Jiang ; TRS Technologies, Inc., State College, PA, USA ; K. A. Snook ; W. S. Hackenberger ; A. Cheng
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Micromachining of bulk piezoelectric substrates for fabrication of high frequency, broadband piezoelectric composite transducers is reported in this paper. A deep reactive ion etching process was developed for bulk PMN-PT single crystal etching with an aspect ratio of >8. A piezoelectric composite with a resonance of 75 MHz was fabricated and the electromechanical coupling coefficient was measured to be 0.67. A 75 MHz piezoelectric composite transducer was prototyped and pulse echo experiments showed that the transducer bandwidth is about 80 - 90% and the sensitivity was significantly improved (>10 dB gain) relative to a commercial 75 MHz transducer. The developed HF piezoelectric composite transducers hold promise for medical ultrasound imaging, ultrasound NDE, and other novel sensors for biological, medical and industrial process monitoring.

Published in:

Sensors, 2008 IEEE

Date of Conference:

26-29 Oct. 2008