By Topic

Piezoelectric AlN energy harvesters for wireless autonomous transducer solutions

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
van Schaijk, R. ; Holst Centre/IMEC-NL, Eindhoven ; Elfrink, R. ; Kamel, T.M. ; Goedbloed, M.

Piezoelectric energy harvesters with aluminum nitride (AlN) are fabricated by micromachining. Devices with different size and mass were fabricated. The devices were packaged by a top and bottom glass wafer with cavities of 200mum to prevent excessive displacements. The devices are characterized on a shaker by applying an oscillation as mechanical input and measuring the power dissipated in a resistive load. A power output was generated of ~10muW for an acceleration of 8g at the resonance frequency of 1155Hz. The power generation for AlN is comparable with lead zirconate-titanate (PZT), despite the much lower piezoelectric constants. This makes AlN a very suitable material for energy harvesters due to its easier processing.

Published in:

Sensors, 2008 IEEE

Date of Conference:

26-29 Oct. 2008