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We have demonstrated the feasibility of thick BaFe12O19 ceramic films fabricated on silicon (100) substrates. We obtained large area (1-in diameter) thick films (100-200 mum) by using a screen printing technique and amorphous SiO2 or Al2O3 buffer layers. To characterize the microstructural, magnetic, and microwave properties of ferrite films, we employed X-ray diffractometry, scanning electron microscopy, energy dispersive X-ray spectroscopy, dc magnetometry, and ferromagnetic resonance (FMR). We placed our emphasis on investigating silicon diffusion in terms of a depth analysis of composition for different buffer layers. We present and discuss FMR measurements for two polycrystalline samples with different buffer layers. We find that a-Al2O3 is superior to a-SiO2 as a buffer layer in achieving a tradeoff between magnetic and mechanical properties.
Date of Publication: Dec. 2008