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Indium Phosphide MEMS Cantilever Resonator Sensors Utilizing a Pentacene Absorption Layer

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6 Author(s)
Siwak, N. ; Dept. of Electr. & Comput. Eng., Univ. of Maryland, College Park, MD, USA ; Xiao Zhu Fan ; Hines, D. ; Kanakaraju, S.
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We report a microelectromechanical system cantilever waveguide resonator sensing platform utilizing a novel optical readout scheme and the organic semiconductor pentacene as a surface absorbing layer. In this paper, the measurement of isopropyl alcohol and ethanol vapors by way of mass induced frequency shift using a cantilever microbalance is demonstrated. Vapor was introduced to the system through a custom built environmental chamber. A frequency shift due to a mass absorption of 65 Hz was measured, corresponding to a measurement of 6.92 ??1.1 ??10-14 g with a minimum detectable mass of 5.09 ??10-15 g for the devices presented. The pentacene absorbing layer in this paper shows it for the first time, functioning as a mass absorbing layer. These results are also the first demonstration of repeatable mass sensing performed using the integrated indium phosphide cantilever waveguide sensor platform.

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Microelectromechanical Systems, Journal of  (Volume:18 ,  Issue: 1 )