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CMOS micro-hotplate array design for nanomaterial-based gas sensors

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3 Author(s)
Udrea, F. ; Dept. of Eng., Univ. of Cambridge, Cambridge ; Ali, S.Z. ; Gardner, J.W.

In this paper we propose novel micro-hotplate arrays for use as nanomaterial-based gas micro sensors. In addition to the better selectivity offered by conventional micro-hotplate arrays, these arrays are more robust, and occupy a relatively small chip area. We present a 2times2 micro-hotplate array as an example, along with its thermal characterisation. In addition we propose arrays connected to each other at wafer level (rather than just within a single chip), that are ideally suited for large volume fabrication of nanomaterial based gas sensors.

Published in:

Semiconductor Conference, 2008. CAS 2008. International  (Volume:1 )

Date of Conference:

13-15 Oct. 2008