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Schottky barrier MOSFETs have recently attracted attention as a viable alternative to conventional CMOS transistors for sub-65-nm technology nodes. An asymmetric Schottky tunneling source SOI MOSFET (STS-FET) is proposed in this paper. The Schottky tunneling source SOI MOSFET has the source/drain regions replaced with silicide as opposed to highly doped silicon in conventional devices. The main feature of this device is the concept of a gate-controlled Schottky barrier tunneling at the source. The device was optimized with respect to various parameters such as Schottky barrier height and gate oxide thickness. The optimized device shows excellent short channel immunity, compared to conventional SOI MOSFETs. The asymmetric nature of the device has been shown to improve the leakage current as well as the linear characteristics of the device as compared to conventional Schottky FETs. The STS-FET was fabricated, using conventional processes combined with the present NiSi technology and large angle implantation, and successfully demonstrated. The high immunity to short channel effects improves the scalability, and the output resistance of the device also makes it an attractive candidate for mixed-mode applications.
Date of Publication: Jan. 2009