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Detection of surface stress induced deflections in piezoelectric cantilever sensors using a charge integrator

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4 Author(s)
Isarakorn, D. ; Inst. of Microtechnol., Univ. of Neuchatel, Neuchatel ; Linder, M. ; Briand, D. ; de Rooij, N.F.

In this paper, we introduce a charge integrator as a read-out system for piezoelectric cantilever sensors. The charge integrator is used to monitor the surface charge induced by piezoelectric materials as a function of mechanical stress. This technique improves the response of piezoelectric cantilever sensors in low frequency measurements which makes them suitable for chemical and biological detection. Furthermore, it is capable of real-time, portable and all electrical detection. The detection of alkanethiols on the Au-coated piezoelectric cantilevers is demonstrated to verify the concept.

Published in:

Control, Automation and Systems, 2008. ICCAS 2008. International Conference on

Date of Conference:

14-17 Oct. 2008

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