By Topic

Three-Dimensional RF MEMS Switch for Power Applications

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Joo-Young Choi ; Dept. of Electr. & Electron. Eng., Imperial Coll. London, London ; Jinyu Ruan ; Fabio Coccetti ; Stepan Lucyszyn

This paper introduces a new concept in 3-D RF microelectromechanical systems switches intended for power applications. The novel switch architecture employs electrothermal hydraulic microactuators to provide mechanical actuation and 3-D out-of-plane silicon cantilevers that have both spring action and latching mechanisms. This facilitates an off-state gap separation distance of 200 mum between ohmic contacts, without the need for any hold power. Having a simple assembly, many of the inherent problems associated with the more traditional suspension-bridge and cantilever-type-beam architectures can be overcome. A single-pole single-throw switch has been investigated, and its measured on-state insertion and return losses are less than 0.3 dB up to 10 GHz and greater than 15 dB up to 12 GHz, respectively, while the off-state isolation is better than 30 dB up to 12 GHz. The switch works well in both hot- and cold-switching modes, with 4.6 W of RF power at 10 GHz and without any signs of degradation to the ohmic contacts.

Published in:

IEEE Transactions on Industrial Electronics  (Volume:56 ,  Issue: 4 )