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This paper presents fabrication as well as chosen electrical and stability properties of laser-shaped thick-film (made on alumina) and LTCC (with DP 951 ceramic tape as a substrate) inductors. Such components are made based on silver or palladium-silver inks with 14-16 ~m thickness. Inductance, resistance and quality factor, QL are determined in a wide frequency (10 kHz - 110 MHz) and temperature (20degC - 250degC) range and are analyzed as a function of inductor geometry (shape and width of conductive tracks) and metallurgy of conductive layer. The stability properties, i.e. fractional inductance and resistance changes after long-term thermal ageing at elevated temperature (150degC and/or 250degC, 250 hours each) are also investigated and analyzed.
Date of Conference: 1-4 Sept. 2008