Cart (Loading....) | Create Account
Close category search window

Two-Layer Electroplated Microcoils With a PECVD Silicon Dioxide Interlayer Dielectric

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Golda, D. ; T-Jet Technol., Menlo Park, CA ; Lang, Jeffrey H. ; Culpepper, M.L.

This paper covers the design, fabrication, and characterization of two-layer microcoils wherein an unannealed plasma-enhanced CVD SiO2 functions as the insulator between silicon- and photoresist-molded copper coils. This design overcomes the thermal limitations placed upon coils that are embedded within polymer molds and thereby enables higher current carrying capability. The fabrication process is compatible with deep reactive-ion etching and may be used to integrate coils with flexures/compliant mechanisms. Thermal and mechanical limitations were determined experimentally and used to create design rules that limit the coil design space. The breakdown strength of the unannealed SiO2 was measured at 4.6 MV/cm. Experiments show that coils with 40-mum pitch, 30 times 30-mum2 winding cross section, and SiO2 thickness of 1 mum may carry more than 1 A (larger than 109 A/m2) with less than 10degC temperature change. These characteristics make the coils useful in small-scale actuators and power systems.

Published in:

Microelectromechanical Systems, Journal of  (Volume:17 ,  Issue: 6 )

Date of Publication:

Dec. 2008

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.