By Topic

Electrowetting for Tunable Microoptics

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Krogmann, F. ; Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg ; Mönch, W. ; Zappe, H.

The design, fabrication, and optical properties of tunable liquid microoptical components based on electrowetting are presented. Two optical microsystems are discussed: a single liquid microlens with tunable focal length, centered and stabilized in a micromachined positioning structure, and laterally repositionable tunable liquid microlens arrays. The latter employs electrowetting for lateral movement as well as focal length tuning of the optical elements. Through the use of novel microstructuring techniques, a high positioning accuracy may be achieved with low electrode count.

Published in:

Microelectromechanical Systems, Journal of  (Volume:17 ,  Issue: 6 )