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Kinetic model of a low-pressure N2-O2 flowing glow discharge

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8 Author(s)
Gordiets, B.F. ; Centro de Electrodinamica, Inst. Superior Tecnico, Lisbon, Portugal ; Ferreira, C.M. ; Guerra, V.L. ; Loureiro, J.M.A.H.
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A self-consistent kinetic model is developed to study dc flowing glow discharges in N2/O2 mixtures. This model includes the calculation of electron energy distribution functions and electron rate coefficients coupled with detailed vibrational kinetics of N2 molecules, chemical kinetics taking into account a large set of neutral, excited and charged species, interaction of N and O atoms at the discharge tube wall, and the thermal balance of the discharge. The results of this model agree reasonably well with the measurements of the electronic density, the gas temperature, the reduced electric field, the vibrational temperature of N2 and the concentration of O, N atoms, NO molecules, N2(C), N2 +(B), and NO(γ) excited states. The comparison was performed in a N2-O2 discharge at pressure p=2 Torr, for discharge currents I=15, 30, and 80 mA, a flow rate Q=100 sccm, and O2 percentages ranging from 0 up to 100%,

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Plasma Science, IEEE Transactions on  (Volume:23 ,  Issue: 4 )