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Modeling of electron cyclotron resonance discharges

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2 Author(s)
Meyyappan, M. ; Scientific Research Inc., Glastonbury, CT, USA ; Govindan, T.R.

A simple model to predict the spatially-averaged plasma characteristics of electron cyclotron resonance (ECR) reactors is presented. The model consists of global conservation equations for species concentration, electron density and energy. A gas energy balance is used to predict the neutral temperature self-consistently. The model is demonstrated for an ECR argon discharge. The predicted behavior of the discharge as a function of system variables agrees well with experimental observations

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Plasma Science, IEEE Transactions on  (Volume:23 ,  Issue: 4 )