Referenced Items are not available for this document.
A one-dimensional fluid model of the microwave electron cyclotron resonance (ECR) discharge, which includes the inhomogeneity effects of the external magnetic field, is developed. We use fluid equations which are obtained from the one-dimensional Bolzmann equation expressed in terms of magnetic moment and parallel velocity. We model the plasma and sheath separately, and appropriate plasma-sheath boundary conditions are utilized. Microwave is represented by an energy flow, and treated by a ray tracing technique. For the argon discharge, we obtain various quantities such as the axial profiles of plasma density, electron temperature, electrostatic potential, fluid velocity, and microwave power deposition. The results of simulation compare well with the experimental observation of the mirror field effects on the plasma parameters
Published in:
Plasma Science, IEEE Transactions on
(Volume:23
,
Issue:
4
)
Date of Publication: Aug 1995
- Page(s):
- 609 - 616
- ISSN :
- 0093-3813
- INSPEC Accession Number:
- 5089777
- Digital Object Identifier :
- 10.1109/27.467981
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 August 2002
- Issue Date :
- Aug 1995
- Sponsored by :
- IEEE Nuclear and Plasma Sciences Society
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