By Topic

Three-dimensional electromagnetic PIC model of a compact ECR plasma source

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Gopinath, V.P. ; Dept. of Electr. Eng., Michigan State Univ., East Lansing, MI, USA ; Grotjohn, T.A.

A three-dimensional electromagnetic particle-in-cell (PIC) model is developed and used to model a compact ECR plasma source. The finite-difference time-domain (FDTD) technique is used to model the microwave fields which excite the plasma at 2.45 GHz. The PIC technique is used to model the dynamics of both the electrons and ions in the plasma. The grid structure used is constructed using the cylindrical coordinate system. Techniques which permit stable numerical solutions in the cylindrical coordinate system are developed and described. The electromagnetic fields and the plasma dynamics are solved in a self-consistent manner. A compact ECR (electron cyclotron resonance) plasma source used for the generation of ions for materials processing is simulated. This source has a plasma size of 3.6 cm in diameter and 3 cm in height. Simulation results of microwave power absorption, plasma potential, and microwave electric fields are presented. Distributed computing techniques are explored to handle the large computer memory requirements and the long computer simulation times associated with the three-dimensional particle-in-cell plasma model

Published in:

Plasma Science, IEEE Transactions on  (Volume:23 ,  Issue: 4 )