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Two-dimensional simulation of inductive plasma sources with self-consistent power deposition

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3 Author(s)
Ming Li ; Inst. of Mech., Chinese Academy of Sci., Beijing, China ; Han-Ming Wu ; Yunming Chen

A time averaged two-dimensional fluid model including an electromagnetic module with self-consistent power deposition was developed to simulate the transport of a low pressure radio frequency inductively coupled plasma source. Comparisons with experiment and previous simulation results show that the fluid model is feasible in a certain range of gas pressure. In addition, the effects of gas pressure and power input have been discussed

Published in:

Plasma Science, IEEE Transactions on  (Volume:23 ,  Issue: 4 )