Cart (Loading....) | Create Account
Close category search window

Ga-Doped ZnO Transparent Conductive Oxide Films Applied to GaN-Based Light-Emitting Diodes for Improving Light Extraction Efficiency

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Jinn-Kong Sheu ; Inst. of Electro-Opt. Sci. Eng. & the Center for Micro/Nano Sci. & Technol., Nat. Cheng Kung Univ. (NCKU), Tainan ; Ming-Lun Lee ; Lu, Y.S. ; Shu, K.W.

In this study, Ga-doped ZnO (GZO) thin films were deposited on a sapphire substrate utilizing a magnetron sputtering approach. ZnO and Ga2O3 targets were employed as the sputtering sources during a cosputtering deposition. After thermal annealing in nitrogen ambient conditions, the electrical resistivity and optical transparency of the GZO films were analyzed in detail. The GZO films exhibited high transparency (~90%) in visible light and low resistivity (~5.3 x 10-4Omega-cm) when they were annealed at a temperature of 600-800deg C. Although the utilization of indium tin oxide (ITO) serving as the transparent contact layer (TCL) in conventional GaN-based light-emitting diodes (LEDs) is a well accepted technology, ZnO-based TCLs with a high refractive index of around 2.0 would render another advantage when a roughening process is performed on the surface. In other words, since packaged LEDs are generally encapsulated using epoxy with a refractive index of around 1.5, surface roughening performed on ITO TCL would thus result in only a minor improvement in light extraction because the typical refractive index of an ITO film prepared by our e-beam evaporator is around 1.7. In this study, GaN-based LEDs that utilized ITO/GZO composite oxide films as a TCL were also demonstrated. The light output power of an LED (LED-C) with a textured ITO/GZO composite TCL is markedly improved by 42 % and 48 % of magnitude as compared to LEDs with a planar GZO TCL (LED-A) and a ITO/GZO composite TCL (LED-B), respectively. This enhancement is due to the fact that a ZnO-based TCL with a higher refractive index (n~2.0) allows further enhancement of light extraction through the creation of a textured structure on the TCL that is deposited on the top surface of LEDs.

Published in:

Quantum Electronics, IEEE Journal of  (Volume:44 ,  Issue: 12 )

Date of Publication:

Dec. 2008

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.