By Topic

A MEMS-Based Coriolis Mass Flow Sensor for Industrial Applications

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Richard Smith ; Integrated Sensing Syst., Inc., Ypsilanti, MI ; Douglas R. Sparks ; Diane Riley ; Nader Najafi

A microfluidic Coriolis mass flow sensor is discussed. The micromachined flow sensors are made using silicon tubes bonded onto a metallized glass substrate. True mass flow rates with an accuracy of better than plusmn0.5% were measured between 1 and 500 g/h. The sensor also provides a temperature and density output. The sensor output was resistant to pressure, temperature, vibration, fluid density, and viscosity. Unlike conventional steel Coriolis mass flowmeters, microelectromechanical-systems-based sensors are immune to external vibration. Applications for these low-flow-rate devices include chemical mixing, additives, biotechnology, chromatography, pharmaceutical development, and other areas where extremely small volumes of liquids are mixed, studied, or metered and where shock and vibration are encountered.

Published in:

IEEE Transactions on Industrial Electronics  (Volume:56 ,  Issue: 4 )